High Purity DI Water Recycling is Possible

This paper discusses approach and technology for the recycling of Deionized water

Transcript

1. Azita Yazdani, P.E. Founder and CEO 949-279-2216 ayazdani@exergycorp.com Point of Use High Purity Water Recovery and Reuse in Microelectronics Manufacturing
3. •  Water supply scarcity is growing in many areas across the globe •  Cost of UPW production is high; water and wastewater management costs have increased significantly •  Quality of UPW impacts product quality and reliability •  Resources such as water are no longer limitless Why recycling and reuse UPW?
4. •  Research shows that water processed by central plants commonly carries or picks up pollutants on its way to the processes •  This water impacts quality of parts processed due to various sources of contamination from central processing and delivery •  Currently most facilities do not employ point of use monitoring for water quality by process or tool UPW Product Quality Impacts
5. ü AEDI reduces DI water usage by 90% ü AEDI reduces DI related costs by 70% ü Allows customers to meet strict Water quality specs in high purity applications
7. Integration Concept
8. Key Features " Includes a hermetically sealed membrane stack " Features include: " Runs continuously " Low energy consumption: 4 kW/1,000 gal " Low maintenance requirement " No Shut Down to replace resins, resin bottles or regenerate
9. Other System Features •  Ionic contamination and TDS removal to ultrapure levels (18 MΩ) •  Particle removal – particle filtration in 0.1 μm, 0.02 μm, or HR (high retention, <0.02 μm) , with <1 psi pressure drop •  Disinfection and bacterial control – UV and other light •  Cations or (precious) metal separation/recovery in one step
10. Key Metrologies Parameter Specification Comments Conductivity 0.02-20 μS/cm Or 0.027-50 ppm pH and Temperature pH = 0-14; T=0-140°F Time lapse = 6 sec. Accuracy= 0.03 Pressure Indicator 0-5000 psi T=14-185°F ΔP Sensor 0-50 psi T=5-185°F Flow Sensor 0.1-6 m/s T=68-185°F Note: All figures noted are at real time. Additional Metrologies such as TOC are added for high purity applications
11. Cost of Ownership Comparison with other Competing Technologies " Advanced EDI (AEDI) $6-9/1,000 gal " Conventional RO/IX (with recovery) $13-18/1,000 gal " Conventional RO/IX (no recovery) $18-28/1,000 gal " IX Bottle Service $28-43/1,000 gal
12. Point of Use Water Recycling Project Performance Data and Cost Savings Summary – A Case Study
13. Clean Line Water Recycling Objective •  Provide a path to reducing water consumption of the cleaning process by at customer site and new planned facilities •  Remove organic and ionic material from the clean line DI rinse water in order to reuse the water •  Recycle the waste water from the DI rinse tanks and the Marangoni Dryers back to the same clean line
14. UPW Specs
15. Clean Line Resistivity In/Out 0.000 0.100 0.200 0.300 0.400 0.500 0.600 0.700 0.00 2.00 4.00 6.00 8.00 10.00 12.00 14.00 16.00 18.00 20.00 10/4/14 0:00 10/24/14 0:00 11/13/14 0:00 12/3/14 0:00 12/23/14 0:00 1/12/15 0:00 2/1/15 0:00 2/21/15 0:00 Amps Resistivity Date/Time Resistivity Out DC Amps
16. Resistivity In and Amperage 0 2 4 6 8 10 12 14 16 18 20 0.000 2.000 4.000 6.000 8.000 10.000 12.000 14.000 16.000 18.000 20.000 10/4/14 0:00 10/24/14 0:00 11/13/14 0:00 12/3/14 0:00 12/23/14 0:00 1/12/15 0:00 2/1/15 0:00 2/21/15 0:00 Resistivity In Date/Time Resistivity In and Voltage DC Amps Resistivity IN Cleaning chemical/Water •  AEDI increases the resistivity back to 18 Mohm by removing anions and cations •  Resistivity out is constant for both cleaning solutions and IPA/water
17. Clean Line Water Recycling Operational Voltage and Current 0.000 0.100 0.200 0.300 0.400 0.500 0.600 0.700 0.800 0 10 20 30 40 50 60 10/4/14 0:00 10/24/14 0:00 11/13/14 0:00 12/3/14 0:00 12/23/14 0:00 1/12/15 0:00 2/1/15 0:00 2/21/15 0:00 Amps Volts Date/Time AEDI Voltage and Amps DC Volts DC Amps •  Voltage is held constant and the current is allowed to float •  Current is staying in the range of 0.050 to 0.220 Amps
18. Clean Line Water Recycling Resistivity Out and Current 0.000 0.100 0.200 0.300 0.400 0.500 0.600 0.700 0.00 2.00 4.00 6.00 8.00 10.00 12.00 14.00 16.00 18.00 20.00 10/4/14 0:00 10/24/14 0:00 11/13/14 0:00 12/3/14 0:00 12/23/14 0:00 1/12/15 0:00 2/1/15 0:00 2/21/15 0:00 Amps Resistivity Date/Time Resistivity vs. Amps Resistivity Out DC Amps Output resistivity holds constant as the current is changed in the range of 0.050 to 0.220 Amps
19. Clean Line Water Recycling Various Chemical rinses TOC reduction •  Rinse water TOC removal is above 90% with AEDI •  Pretreatment with UV can increase TOC removal to 95% to 99% 88.0% 90.0% 92.0% 94.0% 96.0% 98.0% 100.0% TOC Reduction % Chemical Rinse Tank TOC removal with and without Pretreatment Chemical Rinse Tank TOC Reduction
20. Chemical rinse TOC reduction 0 50 100 150 200 250 300 350 400 TOC (ppb) Chemical Solution Chemical Rinse TOC measured Analytical Equipment A vs. B Clean Line Water Recycling •  Rinse water TOC is showing consistent results with •  TOC measurement are impacted by the amount of organic acid in solution
21. Summary of Cost of Ownership Comparison for AEDI vs. Traditional Conventional " AEDI $8.86-11.16/1,000 gal " Current Current Costs(as reported to Exergy) DI water with no recovery $33.12/1,000 gal
22. Cost of Ownership Conventional (estimated) vs. AEDI Cost Comparison of Current Customer Costs Cost of Ownership Current vs. AEDI for 15gpm ($/1,000 gal) Current Plant Cost AEDI COO Fresh water $5.02 $1.01 Sewer charge $2.70 $0.27 D.I. Water service $5.95 $0.40 Wastewater treatment $10.40 $1.04 Depreciation $- $2.34 Parts Not Provided $0.63 Maintenance/Service Not Provided $3.17 Total Cost $22.07 $8.86
23. Comparison of Cost of Ownership ($/1,000 gallons) $- $2.00 $4.00 $6.00 $8.00 $10.00 $12.00 Fresh water Sewer charge D.I. Water service Wastewater treatment Depreciation
24. •  Point of use recovery of DI water can meet water quality specs for fresh DI •  Various Water quality specs for UPW was met •  The tests show that system can operate un- interrupted for many months, without need for service •  Various organics were effectively removed by the AEDI System •  Challenges with TOC measurement need to be addressed Summary of the Performance Testing